摘要: |
对工件特定位置进行加工处理时,电子束直线运动存在可达性差或不可达的限制,利用带电粒子在磁场中受到洛伦兹力作用后运动方向发生改变的原理,采用自制的电磁偏转装置产生特定场强的磁场,对电子束的运动轨迹进行控制使其按照需要偏转一定半径和角度,作用于工件的特定位置,突破局部位置电子束不可达的限制。研究结果显示,电子束圆形束斑偏转后会发生畸变演变为椭圆形束斑,对管件内壁进行多道搭接处理可以获得可控的过渡作用效果,满足使用要求。 |
关键词: 电子束 不可达性 轨迹控制 电磁偏转 |
基金项目: |
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Study on the Electron Beam Trajectory Control Technology by Electromagnetic Deflection |
Zhang Yonghe Wang Shiwei He Jun
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Science and Technology on Surface Engineering Laboratory, Lanzhou Institute of Physics, Lanzhou 730000
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Abstract: |
For the special position of workpiece, the electron beam linear motion is inaccessible. According to the principle, motion direction of charged particles will change after the Lorenz force in electromagnetic interaction. To break through the inaccessibility, electromagnetic deflection device was used to generate a certain size and direction of the magnetic field, and electron beam motion trajectory was controlled under a certain radius and angle while working on the specific position of workpiece. The results showed that the circular wave-spot distorted as an elliptic spot after deflection, and the requirement of the inner surface modification can be met by multichannel overlap processing. |
Key words: electron beam inaccessibility trajectory control electromagnetic deflection |