摘要: |
本文介绍了石英晶体谐振器电极变色的原理,通过长期监测超净间中微小尘埃粒子数,重点讨论了大气环境中微小尘埃和超净间中微小尘埃粒子数与晶体谐振器电极变色的关系。最后给出了防止石英晶体谐振器电极变色的一些措施。 |
关键词: 石英晶体;微小尘埃;电极变色 |
基金项目: |
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Study on Effect of Tiny Dust on Discoloration of Crystal Resonator Electrodes |
Sui Jianping Cui Wei Duan Youfeng Zheng Wenqiang Ye Lin
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Beijing Institute of Radio Measurement and Metrology, Beijing 100854
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Abstract: |
This paper introduces the principle of quartz crystal resonator electrode discoloration. Through the long-term monitoring of the number of tiny dust particles in the ultra-clean room, the relationship between the number of tiny dust particles and the discoloration of the crystal resonator electrodes was discussed. Finally, the methods of preventing the discoloration of the quartz crystal resonator electrode were given. |
Key words: quartz crystal;tiny dust;electrode discoloration |